Enhanced quality of laser ablation by controlling laser repetition rate
US8344286B2 · kind B2 · utility
1Cited by
10References
10Claims
0Family size
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Key dates
| Filing date | Jan 18, 2007 |
| Grant date | Jan 1, 2013 |
| Priority date | — |
| Expiry date | Nov 3, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/52
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method of enhancing the quality of laser ablation by controlling the laser repetition rate during the ablation process, wherein the method enhances the quality of laser ablation of a photomask in order to improve the optical quality thereof. Also provided is a system employing the method of enhancing the quality of laser ablation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.