Patent · US Active

Pressure sensor

US8344314B2 · kind B2 · utility

1Cited by

27References

30Claims

0Family size

Assignee

ABB RESEARCH LTD. · CH

Inventors

Axel Kramer · Greifswald, DE
Frank Kassubek · Rheinfelden (Baden), DE
Klaus Bohnert · Oberrohrdorf, CH
Hubert Braendle · Oberengstringen, CH

Key dates

Filing date	Jan 11, 2010
Grant date	Jan 1, 2013
Priority date	—
Expiry date	Aug 19, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01L1/24
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor is disclosed with at least one pressure sensing element, the pressure induced changes in the optical properties of which are evaluated by illumination with at least one light source. The pressure sensor can include at least two semiconductor-based pressure sensing elements located in individual pressure chambers, which sensing elements are located essentially adjacent to each other. The sensing elements can be irradiated with the same light source, wherein the light transmitted through the sensing elements is detected using at least two corresponding detectors, and wherein the differential pressure in the two pressure chambers is evaluated based on the output of these detectors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.