Capacitive electro-mechanical transducer, and fabrication method of the same
US8344587B2 · kind B2 · utility
2Cited by
9References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 5, 2010 |
| Grant date | Jan 1, 2013 |
| Priority date | — |
| Expiry date | Mar 12, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49005
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A capacitive electro-mechanical transducer includes a plurality of cavities, a communicating portion for connecting the cavities to each other, and two electrodes sandwiching each of the cavities. The cavities are sealed from outside, and at least a portion of the communicating portion is closed to interrupt the communication between the cavities through the communicating portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.