Interferometric device for position measurement and coordinate measuring machine

US8351049B2 · kind B2 · utility

Assignee

• Vistec Semiconductor Systems GmbH · DE

Inventors

• Hans-Artur Boesser · Breidenbach, DE
• Siegfried Peter Kluge · Fronhausen, DE
• Joerg Lenz · Kassel, DE
• Gerhard Joseph Nickel · Wetzlar, DE

Key dates

• Filing date: Jul 7, 2009
• Grant date: Jan 8, 2013
• Expiry date: Dec 17, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B2290/70
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An interferometric device for position measurement of an element moveable in a plane is disclosed. A laser light source measures the position of the moveable element and emits the required measuring light. A beam splitter splits the measuring light into a first partial beam path and a second partial beam path, which each impinge on a reflecting surface of the moveable element via an interferometer. Herein, at least the beam splitter, which splits the measuring light into a first partial beam path and a second partial beam path, and the beam splitter, which directs the third partial beam path onto an etalon via an interferometer, have a respective beam trap associated with them, which traps the light returning from the respective interferometers.