MEMS actuator assembly for optical switch
US8353600B1 · kind B1 · utility
18Cited by
2References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 23, 2010 |
| Grant date | Jan 15, 2013 |
| Priority date | — |
| Expiry date | Dec 8, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/357
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical system (MEMS) actuator assembly includes a mirror and four actuators. Each actuator includes a lever pivotable about a fulcrum axis. The inner end of each lever is coupled to one side of the mirror. Force is applied to one outer end of the levers to move one side of the mirror, which positions the mirror in one of four positions. Force is applied to two outer ends of the levers to move two sides of the mirror, which positions the mirror in one of four additional positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.