Monolithic passive THz detector with energy concentration on sub-pixel suspended MEMS thermal sensor
US8354642B2 · kind B2 · utility
3Cited by
3References
23Claims
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Key dates
| Filing date | Oct 13, 2010 |
| Grant date | Jan 15, 2013 |
| Priority date | — |
| Expiry date | Feb 16, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A THz radiation detector comprising a plurality of antenna arms separated from a suspended platform by an isolating thermal air gap. The detector functions to concentrate THz radiation energy into the smaller suspended MEMS platform (e.g., membrane) upon which a thermal sensor element is located. The THz photon energy is converted into electrical energy by means of a pixilated antenna using capacitive coupling in order to couple this focused energy across the thermally isolated air gap and onto the suspended membrane on which the thermal sensor is located.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.