Patent · US Active

Sensor with improved thermal stability

US8356514B2 · kind B2 · utility

7Cited by
45References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 13, 2011
Grant dateJan 22, 2013
Priority date—
Expiry dateFeb 11, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01F1/692
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Improved sensors are disclosed that include a heater resistor and/or one or more sensor resistors. In some instances, the heater resistor may be configured to have a zero or near-zero temperature coefficient of resistance (TCR), while one or more sensor resistors may be configured to have a non-zero higher TCR. In some instances, the heater resistor may include a polysilicon material that is doped with a first concentration of dopant, and the one or more sensing elements may include a polysilicon material that is doped with a second higher concentration of dopant. In some cases, the first concentration of dopant may be configured to provide a heater resistor that has a zero or near-zero temperature coefficient of resistance (TCR).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.