Retainer and substrate storage container
US8356713B2 · kind B2 · utility
4Cited by
3References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 30, 2008 |
| Grant date | Jan 22, 2013 |
| Priority date | — |
| Expiry date | Nov 14, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67369
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A retainer includes a frame, a pair of first elastic parts projected from a pair of opposing parts of the frame so as to approach to each other, and a second elastic part that is supported at the bent free ends of the paired first elastic parts to hold a substrate. The outside end of the second elastic part is positioned outside the free end of the first elastic part and closer to the opposing part of the frame. Also, first and second holds for holding the rim of the substrate are formed apart from each other. The second hold is positioned on the outer end side of the second elastic part from the first hold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.