Adjustable solubility in sacrificial layers for microfabrication
US8357616B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2006 |
| Grant date | Jan 22, 2013 |
| Priority date | — |
| Expiry date | Sep 15, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0735
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention provides fabrication methods using sacrificial materials comprising polymers. In some embodiments, the polymer may be treated to alter its solubility with respect to at least one solvent (e.g., aqueous solution) used in the fabrication process. The preparation of the sacrificial materials is rapid and simple, and dissolution of the sacrificial material can be carried out in mild environments. Sacrificial materials of the present invention may be useful for surface micromachining, bulk micromachining, and other microfabrication processes in which a sacrificial layer is employed for producing a selected and corresponding physical structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.