High-scan rate positioner for scanned probe microscopy
US8358039B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2009 |
| Grant date | Jan 22, 2013 |
| Priority date | — |
| Expiry date | Oct 24, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.