Lighting method of light source apparatus
US8358069B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 4, 2010 |
| Grant date | Jan 22, 2013 |
| Priority date | — |
| Expiry date | Oct 22, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70925
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.