Temperature compensated MEMS device
US8358296B2 · kind B2 · utility
7Cited by
12References
53Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2004 |
| Grant date | Jan 22, 2013 |
| Priority date | — |
| Expiry date | Sep 12, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2320/041
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electromechanical system (MEMS) includes a flexure, a voltage generator, and a temperature sensor thermally coupled to the MEMS, wherein the voltage generator is configured to produce a temperature compensated voltage in response to a thermal measurement performed by the temperature sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.