Liquid vaporization system
US8361231B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2010 |
| Grant date | Jan 29, 2013 |
| Priority date | — |
| Expiry date | Mar 30, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01B1/005
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Provided is a liquid vaporization system capable of promoting vaporization of a liquid material while solving a problem of residual liquid material. A liquid vaporization system has a liquid vaporization apparatus having a pump and a vaporizer. The vaporizer has a case, a heater provided inside the case, a heat storage plate heated by the heater, and a mesh. The mesh is formed by interweaving wires and has an overall flat plate shape. By overlapping the mesh on an upper surface of the heat storage plate, minute irregularities are formed on the heat storage plate by the mesh. A nozzle is provided above the mesh, whereby the liquid material is dropped from the nozzle onto the heat storage plate. The liquid material spreads over the heat storage plate in a thin film and is heated and vaporized on the upper surface of the heat storage plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.