MEMS microphone with spring suspended backplate
US8363860B2 · kind B2 · utility
10Cited by
4References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 5, 2010 |
| Grant date | Jan 29, 2013 |
| Priority date | — |
| Expiry date | Feb 8, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49005
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS microphone has a base, a backplate, and a backplate spring suspending the backplate from the base. The microphone also has a diaphragm forming a variable capacitor with the backplate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.