Mechanical-quantity measuring device
US8365609B2 · kind B2 · utility
4Cited by
7References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 6, 2011 |
| Grant date | Feb 5, 2013 |
| Priority date | — |
| Expiry date | Jul 6, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mechanical-quantity measuring device capable of measuring a strain component in a specific direction with high precision is provided.At least two or more pairs of bridge circuits are formed inside a semiconductor monocrystal substrate and a semiconductor chip, and one of these bridge circuits forms a n-type diffusion resistor in which a direction of a current flow and measuring variation of a resistor value are in parallel with a <100> direction of the semiconductor monocryastal silicon substrate, and an another bridge circuit is composed of combination of p-type diffusion resistors in parallel with a <110> direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.