Methods and systems of transferring, docking and processing substrates

US8367565B2 · kind B2 · utility

Assignee

• Archers Inc. · KY

Inventors

• Lawrence Chung-Lai Lei · Milpitas, US
• Alfred Mak · Union City, US
• Rex Liu · Castro Valley, US
• Kon Park · Livermore, US
• Samuel S. Pak · San Ramon, US
• Tzy-Chung Terry Wu · Palo Alto, US
• Simon Zhu · Sunnyvale, US
• Ronald L. Rose · San Jose, US
• Gene Shin · San Jose, US
• Xiaoming Wang · Sunnyvale, US

Key dates

• Filing date: Dec 20, 2010
• Grant date: Feb 5, 2013
• Expiry date: Feb 8, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/6776
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

In accordance with some embodiments described herein, a method for transferring a substrate is provided. The method includes loading one or more substrates into a respective mobile chamber of one or more mobile chambers. The mobile chambers are movable on a first rail positioned adjacent to two or more process modules. Each mobile chamber is configured to maintain a specified gas condition. The respective mobile chamber is moved along the first rail. The respective mobile chamber is docked to a respective process module of the two or more process modules. At least one of the one or more substrates is conveyed from the respective mobile chamber to the respective process module.