System and method for multi-pulse laser processing
US8367968B2 · kind B2 · utility
1Cited by
10References
26Claims
0Family size
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Key dates
| Filing date | Jan 3, 2008 |
| Grant date | Feb 5, 2013 |
| Priority date | — |
| Expiry date | Aug 26, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Laser pulses are selected from a group of closely spaced laser pulses with an optical modulator by adjusting pulse timing relative to an impingement interval. An adjusted pulse is moved from an impingement interval to a non-impingement interval and is blocked. The blocked laser source is stabilized by running nearly continuously. Pulse selection with multiple laser sources is achieved with a single acousto-optic modulator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.