MEMS device with independent rotation in two axes of rotation
US8368983B2 · kind B2 · utility
1Cited by
33References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2010 |
| Grant date | Feb 5, 2013 |
| Priority date | — |
| Expiry date | Dec 16, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2207/07
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.