Method for inspecting measurement object
US8369603B2 · kind B2 · utility
4Cited by
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11Claims
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Key dates
| Filing date | Jul 2, 2010 |
| Grant date | Feb 5, 2013 |
| Priority date | — |
| Expiry date | Jun 23, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T7/521
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection method for inspecting a device mounted on a substrate, includes generating a shape template of the device, acquiring height information of each pixel by projecting grating pattern light onto the substrate through a projecting section, generating a contrast map corresponding to the height information of each pixel, and comparing the contrast map with the shape template. Thus, a measurement object may be exactly extracted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.