Micromechanical sensor element for capacitive differential pressure detection
US8371180B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 9, 2011 |
| Grant date | Feb 12, 2013 |
| Priority date | — |
| Expiry date | Aug 17, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L13/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor concept for capacitive pressure measurement yields reliable measurement results and is for aggressive particle-bearing measuring environments. This sensor element is a micromechanical sensor element, whose structural elements are implemented in a layered structure. The sensor element includes two pressure connections separated from each other, a deflectable carrier element for at least one deflectable measuring electrode, and at least one stationary counter electrode for the measuring electrode. The carrier element spans a closed cavity in the layered structure. The carrier element is spanned by a cap structure, and is suspended on the cap structure via a suspension web functioning as a rocker bearing. The two pressure connections are connected to the carrier element's top side which is divided by the suspension web into two separated pressure connection zones. The measuring electrode is on the carrier element's underside and the counter electrode is on the cavity's opposite wall.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.