Patent · US Active

Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator

US8373136B2 · kind B2 · utility

2Cited by

6References

22Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Gerald Schoenecker · Munich, DE
Stefan Lanio · Erding, DE

Key dates

Filing date	Oct 15, 2009
Grant date	Feb 12, 2013
Priority date	—
Expiry date	Nov 24, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/153
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.