Patent · US Active

Device to detect and measure static electric charge

US8373232B2 · kind B2 · utility

1Cited by
8References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 1, 2010
Grant dateFeb 12, 2013
Priority date—
Expiry dateAug 12, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A device (10) to detect and measure static electric charge (q) on an object (100) being positioned in a distance (r.) from an input electrode (11) of the device (10) comprises at least one MOS field transistor (20). The input electrode (11) is connected with the gate electrode (21) of the MOS-FET (20) to detect said electrical charge. The MOS-FET (20) can comprise a gate oxide layer underneath the gate (21) and over the source (22) and drain (23) areas having a sufficient thickness to allow the MOS field transistor (20) to withstand several kilovolts (kV) of voltage and to avoid the loss of charges by tunnel effect due to the high potential of the gate electrode during ESD events.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.