Patent · US Active

Plasma insensitive height sensing

US8373425B2 · kind B2 · utility

1Cited by
13References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 4, 2008
Grant dateFeb 12, 2013
Priority date
Expiry dateJul 7, 2029

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B7/14
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, an AC signal, and determining the distance based on the measured AC signal. A system for determining a distance between a first piece and a second piece includes a measuring device adapted to measure, at one or both of the first and second piece, an AC signal, and a signal processing device adapted to determine the distance based on the measured AC signal. The AC signal includes a DC offset.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.