High accuracy MEMS-based varactors
US8373522B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 3, 2010 |
| Grant date | Feb 12, 2013 |
| Priority date | — |
| Expiry date | Apr 30, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G5/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Systems including varactor devices are provided. A varactor device (400) includes a gap closing actuator (GCA) varactor (200), includes a drive comb structure (201), an output varactor structure (514) defining an output capacitance, a reference varactor structure (214) defining a reference capacitance, and a movable truss comb structure (204) interdigitating the drive comb, the output varactor, and the reference varactor structures. The truss comb structure moves along a motion axis (205) between interdigitating positions based on a bias voltage. The device also includes a feedback circuit (404) configured for modifying an input bias voltage based on the reference capacitance to produce the output bias voltage that provides a target capacitance associated with the input bias voltage at the output varactor structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.