Microelectromechanical gyroscope with position control driving and method for controlling a microelectromechanical gyroscope
US8375789B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2010 |
| Grant date | Feb 19, 2013 |
| Priority date | — |
| Expiry date | Mar 22, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F3/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS gyroscope includes: a microstructure having a fixed structure, a driving mass, movable with respect to the fixed structure according to a driving axis, and a sensing mass, mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass according to a sensing axis, in response to rotations of the microstructure; and a driving device, for keeping the driving mass in oscillation with a driving frequency. The driving device includes a discrete-time sensing interface, for detecting a position of the driving mass with respect to the driving axis and a control stage for controlling the driving frequency on the basis of the position of the driving mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.