Flow restrictor
US8376312B2 · kind B2 · utility
22Cited by
23References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 31, 2007 |
| Grant date | Feb 19, 2013 |
| Priority date | — |
| Expiry date | Apr 7, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together.A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.