Methods and systems for purifying gases
US8377171B2 · kind B2 · utility
1Cited by
19References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 2010 |
| Grant date | Feb 19, 2013 |
| Priority date | — |
| Expiry date | May 11, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/40
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention relates to methods and systems for purifying gases, such as for example semiconductor process gases. The invention more particularly relates to fluid purification methods and systems having improved heat transfer capabilities and controls such that the purified fluid produced from the process contains reduced impurity levels and/or exhibits more uniform concentrations within the final product. In another aspect of the invention, the activation time for adsorbent beds used in such processes and systems can be reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.