Patent · US Active

Method for manufacturing porous microstructures, porous microstructures manufactured according to this method, and the use thereof

US8377315B2 · kind B2 · utility

0Cited by

4References

17Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Dick Scholten · Stuttgart, DE
Tjalf Pirk · Stuttgart, DE
Michael Stumber · Ditzingen, DE
Franz Laermer · Stuttgart, DE
Ralf Reichenbach · Eßlingen, DE
Ando Feyh · Palo Alto, US

Key dates

Filing date	Nov 19, 2008
Grant date	Feb 19, 2013
Priority date	—
Expiry date	Oct 13, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/249978
WIPO fieldPharmaceuticals
WIPO sectorChemistry

Abstract

A method for manufacturing porous microstructures in a silicon semiconductor substrate, porous microstructures manufactured according to this method, and the use thereof.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.