Patent · US Active

Compound interferometer with monolithic measurement cavity

US8379219B2 · kind B2 · utility

1Cited by

9References

21Claims

0Family size

Assignee

CORNING INCORPORATED · US

Inventors

John Weston Frankovich · Fairport, US
Christopher Lee · Pleasanton, US
Michael Joseph Litzenberger · Fairport, US

Key dates

Filing date	May 27, 2011
Grant date	Feb 19, 2013
Priority date	—
Expiry date	Oct 31, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01B2290/25
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A compound common-path interferometer including first and second measurement arms for measuring a test object is arranged so that a reference optic of the first measurement arm is disconnected from a remainder of the first measurement arm and a coupling between the reference optics of the first and second measurement arms forms a monolithic measurement cavity for maintaining reference surfaces of the reference optics at a fixed spacing and orientation. Separate supports are provided for the monolithic measurement cavity and the remainder of the first measurement arm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.