Integrated monolithic interference detection device
US8379223B2 · kind B2 · utility
0Cited by
1References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2007 |
| Grant date | Feb 19, 2013 |
| Priority date | — |
| Expiry date | Apr 9, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T83/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a device (10,20) for detecting a phase difference between two light beams (8A, 8B), said device including: a diffraction grating (2) which can generate an interference field between the two light beams; and a photodiode (1,5) which is arranged to receive the interference field, said diffraction grating being integrated to the photodiode. The invention is characterized in that the diffraction grating is an amplitude grating (2).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.