Patent · US Active

Optical metrology on textured samples

US8379227B2 · kind B2 · utility

1Cited by
8References
28Claims
0Family size

Assignee

Inventor

Key dates

Filing dateOct 28, 2009
Grant dateFeb 19, 2013
Priority date—
Expiry dateJun 30, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/55
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

One or more parameters of a sample that includes a textured substrate and one or more overlying films is determined using, e.g., an optical metrology device to direct light to be incident on the sample and detecting light after the incident light interacts with the sample. The acquired data is normalized using reference data that is produced using a textured reference sample. The normalized data is then fit to simulated data that is associated with a model having an untextured substrate and one or more variable parameters. The value(s) of the one or more variable parameters from the model associated with the simulated data having the best fit is reported as measurement result.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.