Method for adjusting an acceleration sensor

US8381570B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Torsten Ohms · Lambach, DE
• Axel Franke · Ditzingen, DE

Key dates

• Filing date: Nov 12, 2010
• Grant date: Feb 26, 2013
• Expiry date: Aug 26, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/082
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.