Echtant and method for manufacturing display device using the same
US8383437B2 · kind B2 · utility
3Cited by
2References
18Claims
0Family size
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Key dates
| Filing date | Sep 1, 2011 |
| Grant date | Feb 26, 2013 |
| Priority date | — |
| Expiry date | Sep 1, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/6729
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An etchant according to exemplary embodiments of the present invention includes about 0.5 wt % to about 20 wt % of persulfate, about 0.01 wt % to about 2 wt % of a fluorine compound, about 1 wt % to about 10 wt % of inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 5 wt % of a chlorine compound, about 0.05 wt % to about 3 wt % of copper salt, about 0.1 wt % to about 10 wt % of organic acid or organic acid salt, and water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.