Electroactive polymer actuator and method of manufacturing the same
US8384271B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2010 |
| Grant date | Feb 26, 2013 |
| Priority date | — |
| Expiry date | Jan 11, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49165
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A multilayer electroactive polymer actuator and a method of manufacturing the same. The multilayer electroactive polymer actuator is divided into an actuating area and a non-actuating area. A plurality of driving electrodes, each formed on a side of the respective polymer layer to correspond to the actuating area. A plurality of extension electrodes connected to the driving electrodes and a common electrode for vertically connecting the extension electrodes are formed to correspond to the non-actuating area. A via hole is formed through the plurality of non-actuating layers and has a diameter which increases in a stepwise manner upwards. The common electrode is formed in the via hole. The driving electrode includes an alloy of aluminum and copper. The extension electrode is formed of material having a small reactivity with respect to laser as compared to the reactivity of the polymer layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.