Patterning nano-scale patterns on a film comprising unzipping polymer chains
US8389205B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2009 |
| Grant date | Mar 5, 2013 |
| Priority date | — |
| Expiry date | Apr 27, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/2049
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g. thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g. into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.