Patent · US Active

Silicon-ceramic composite substrate

US8391013B2 · kind B2 · utility

3Cited by

1References

14Claims

0Family size

Assignees

Technische Universität Ilmenau · DE
Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Michael Fischer · Sturtevant, US
Heike Bartsch De Torres · Ilmenau, DE
Martin Hoffmann · Zwingenberg, DE
Jens-Peter Muller · Differdange, LU
Beate Pawlowski · Jena, DE
Stefan Barth · Jena, DE

Key dates

Filing date	Dec 4, 2008
Grant date	Mar 5, 2013
Priority date	—
Expiry date	Jul 9, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/24545
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A silicon-ceramic composite substrate includes a low-temperature ceramic having at least one pre-formed ceramic layer and a silicon substrate. The low-temperature ceramic forms a carrier layer and the silicon substrate surface has a contact area with nanostructures) that completely penetrate into the low-temperature ceramic.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.