System and method for scanning of probe arrays
US8391582B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 25, 2012 |
| Grant date | Mar 5, 2013 |
| Priority date | — |
| Expiry date | May 25, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/6471
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An embodiment of a scanning system is described including optical elements that direct an excitation beam at a probe array, detectors that receive reflected intensity data responsive to the excitation beam, where the reflected intensity data is responsive to a focusing distance between an optical element and the probe array, a transport frame that adjusts the focusing distance in a direction with respect to the probe array, an auto-focuser that determines a best plane of focus based upon characteristics of the reflected intensity data of at least two focusing distances where the detectors further receive pixel intensity values based upon detected emissions from a plurality of probe features disposed on the probe array at the best plane of focus, and an image generator that associates each of the pixel intensity values with at least one image pixel position of a probe array based upon one or more position correction values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.