Piezoresistor height sensing cantilever
US8393011B2 · kind B2 · utility
1Cited by
26References
31Claims
0Family size
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Key dates
| Filing date | May 13, 2009 |
| Grant date | Mar 5, 2013 |
| Priority date | — |
| Expiry date | Jun 18, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q80/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.