Electrical device fabrication from nanotube formations
US8394664B2 · kind B2 · utility
6Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2007 |
| Grant date | Mar 12, 2013 |
| Priority date | — |
| Expiry date | Jul 18, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/221
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for forming nanotube electrical devices, arrays of nanotube electrical devices, and device structures and arrays of device structures formed by the methods. Various methods of the present invention allow creation of semiconducting and/or conducting devices from readily grown SWNT carpets rather than requiring the preparation of a patterned growth channel and takes advantage of the self-controlling nature of these carpet heights to ensure a known and controlled channel length for reliable electronic properties as compared to the prior methods.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.