Metrology probe and method of configuring a metrology probe
US8397311B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 28, 2010 |
| Grant date | Mar 12, 2013 |
| Priority date | — |
| Expiry date | May 28, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A metrology probe capable of measurements of a broad range of physical properties of individual samples of nano- or sub-nanometer dimensions is provided. The probe comprises a probe body, a substrate connected to the probe body, and a tip proximate the substrate. The probe further comprises a coarse piezoelectric actuator having an electrical input. The coarse piezo is configured to cause the tip and/or the substrate to move relative to each other when a first electrical signal is provided to the electrical input. The probe further comprises a low-pass filter in electrical communication with the electrical input of the coarse piezo. The probe further comprises a fine piezoelectric actuator having an electrical input configured to cause the tip and/or the substrate to move relative to each other when a second electrical signal is provided to the electrical input.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.