Patent · US Active

Turbomolecular pump

US8398362B2 · kind B2 · utility

0Cited by

7References

7Claims

0Family size

Assignee

PFEIFFER VACUUM · FR

Inventors

Armin Conrad · Herborn, DE
Peter Fahrenbach · Solms, DE

Key dates

Filing date	Mar 14, 2005
Grant date	Mar 19, 2013
Priority date	—
Expiry date	Sep 22, 2031

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF05D2250/70
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side having a blade angle (α) that is steeper than blade angle (α) of the blades (10) located in vicinity of the vacuum side, and with the blade angle (α) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.