Method of manufacturing a micromechanical part
US8398865B2 · kind B2 · utility
1Cited by
1References
29Claims
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Key dates
| Filing date | Jul 10, 2009 |
| Grant date | Mar 19, 2013 |
| Priority date | — |
| Expiry date | Jul 14, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49579
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of manufacturing a mechanical part includes the steps of providing a micro-machinable substrate; etching a pattern which includes the part through the entire substrate using photolithography; mounting the etched substrate on a support so as to leave the top and bottom surfaces of said substrate accessible for coating; depositing a tribological quality improving coating of on the outer surface of the part; and releasing the part from the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.