Ordered vertically oriented porous inorganic films produced through solution processing
US8399057B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 8, 2006 |
| Grant date | Mar 19, 2013 |
| Priority date | — |
| Expiry date | Feb 14, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G9/2031
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Porous films with straight pores oriented normal to the plane of the films are produced through solution processing techniques. The production takes advantage of inorganic-surfactant or inorganic-polymer co-assembly and a patterned substrate. The patterned substrate, which is also produced via solution phase self-assembly, forces vertical orientation in a hexagonal cylinder system with no practical limits in substrate size or type. This provides a route to vertically oriented inorganic pores with a pitch ranging from 3 nm to over 15 nm and pore sizes ranging from 2 nm to over 12 nm. The size is tuned by choice the choice of organic templating agents and the deposition conditions. The pores can be produced with or without a capping layer which can be used to seal the nanopores.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.