Method and device for the detection of defects in an object

US8400630B2 · kind B2 · utility

Assignee

• GP Inspect GmbH · DE

Inventors

• Marc Hemsendorf · Birkenfeld, DE
• Christian Probst · Birkenfeld, DE

Key dates

• Filing date: Sep 2, 2010
• Grant date: Mar 19, 2013
• Expiry date: Mar 25, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/845
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for detecting defects in an object includes a step of locally illuminating the object by radiating in light having a wavelength to which the object is transparent. Multiply reflected components of the incident light are detected while the detection of directly transmitted components of the incident light is at least partly avoided and the detection of singly reflected components of the incident light is at least partly avoided. Defects are identified by evaluating intensity differences in the detected components of the incident light. There is also disclosed a device for carrying out the method.