MEMS actuator device with integrated temperature sensors
US8402561B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 15, 2009 |
| Grant date | Mar 19, 2013 |
| Priority date | — |
| Expiry date | Aug 31, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q10/04
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An electro-thermal actuator which includes a unit cell comprising at least one thermal bimorph, the thermal bimorph comprising at least two materials of different thermal expansion coefficient bonded together, the unit cell having a first end and a second end; and at least one temperature sensor located on the at least one thermal bimorph for measuring a temperature of the at least one thermal bimorph and determining a position of the unit cell. The basic structure can be expanded to 1-D, 2-D and 3-D positioners. The bimorphs can also be coupled to an active yoke which is in turn anchored to a plate, in order to reduce the parasitic heat effects on displacement of the tip of the bimorph.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.