Patent · US Active

Pressure difference measuring cell

US8402836B2 · kind B2 · utility

7Cited by

3References

11Claims

0Family size

Assignee

ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

Wolfgang Dannhauer · Teltow, DE
Michael Philipps · Lörrach, DE
Friedrich Schwabe · Kleinmachnow, DE
Dieter Stolze · Potsdam, DE
Anh Tuan Tham · Berlin, DE

Key dates

Filing date	Dec 12, 2008
Grant date	Mar 26, 2013
Priority date	—
Expiry date	Nov 12, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01L13/026
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure difference measuring cell for registering pressure difference between a first pressure and a second pressure, comprises: an elastic measuring arrangement having at least one measuring membrane, or diaphragm, that comprises silicon; a platform, which is pressure-tightly connected with the elastic measuring arrangement; a first hydraulic path for transferring a first pressure onto a first surface section of the elastic measuring arrangement; and a second hydraulic path for transferring a second pressure onto a second surface section of the elastic measuring arrangement. The first pressure opposes the second pressure, and the elastic deflection of the measuring arrangement is a measure for the difference between the first and the second pressure, wherein the pressure difference measuring cell has additionally at least one hydraulic throttle, characterized in that the at least one hydraulic throttle comprises porous silicon.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.