Out-of-plane deflection MEMS actuator for projectile control surfaces
US8405012B1 · kind B1 · utility
3Cited by
10References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2007 |
| Grant date | Mar 26, 2013 |
| Priority date | — |
| Expiry date | Apr 10, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/058
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A MEMS type actuator includes a substrate defining a plane; a micro bellows disposed on the substrate and operable to expand in a direction out of a substrate plane, the substrate having an opening therein for fluid flow to the micro bellows; and a ramp disposed above the micro bellows. In a collapsed position of the micro bellows, the ramp is substantially parallel to the plane of the substrate and, in expanded positions of the micro bellows, the micro bellows applies a force to the ramp thereby causing rotation of the ramp in a direction out of the substrate plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.