Apparatus and method for the production of trisilylamine
US8409513B2 · kind B2 · utility
11Cited by
5References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 2, 2010 |
| Grant date | Apr 2, 2013 |
| Priority date | — |
| Expiry date | Mar 16, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/1943
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
There is described an apparatus, a tubular laminar flow, plug flow reactor, for making silylamines and particularly trisilylamine (TSA) in high yields from ammonia gas and a monohalosilane gas. The apparatus can be a tubular flow reactor comprising a first portion of the reactor defining a gas entry zone, a second portion of the reactor defining a reaction zone and a third portion of the reactor defining a separation zone, the reaction zone providing a reactant contacting region. Trisilylamine can be recovered in the separation zone in a cold trap collection vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.