Methods, apparatuses, and systems for micromechanical gas chemical sensing capacitor
US8410562B2 · kind B2 · utility
1Cited by
13References
20Claims
0Family size
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Key dates
| Filing date | Jan 21, 2011 |
| Grant date | Apr 2, 2013 |
| Priority date | — |
| Expiry date | Jun 4, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/227
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive chemical sensor, along with methods of making and using the sensor are provided. The sensors described herein eliminate undesirable capacitance by etching away the substrate underneath the capacitive chemical sensor, eliminating most of the substrate capacitance and making changes in the chemical-sensitive layer capacitance easier to detect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.