Ultra-wide angle MEMS scanner architecture
US8411340B2 · kind B2 · utility
2Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2010 |
| Grant date | Apr 2, 2013 |
| Priority date | — |
| Expiry date | Aug 2, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/143
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An optical microscanner achieves wide rotation angles utilizing a curved reflector. The optical microscanner includes a moveable mirror for receiving an incident beam and reflecting the incident beam to produce a reflected beam and a Micro Electro-Mechanical System (MEMS) actuator that causes a linear displacement of the moveable mirror. The curved reflector produces an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.